| Description | Specification |
|---|---|
| Working Speed | 5M/min |
| Substrate Width | 120mm |
| Substrate Thickness | 6um |
| Coating Type | Multi Type |
| Loading Uniformity | Target ±1.5% |
| Dryer Type | 0.8M * 3 Zones |
| Heat Source | Electrical Heater |
| Dimension(M) | 1.2(W)*4.6(L)*2.5(H) |
| Description | Specification |
|---|---|
| Working Speed | 5M/min |
| Substrate Width | 400mm |
| Substrate Thickness | 6um |
| Coating Type | Multi Type |
| Loading Uniformity | Target ±1.5% |
| Dryer Type | 1M * 4 Zones |
| Heat Source | Electrical Heater |
| Dimension(M) | 2.0(W)*6.0(L)*2.8(H) |
| Description | Specification |
|---|---|
| Working Speed | 5M/min |
| Substrate Width | 250mm |
| Substrate Thickness | 6um |
| Coating Type | Slit Die |
| Loading Uniformity | Target ±1.5% |
| Dryer Type | 1M * 4 Zones |
| Heat Source | Electrical Heater |
| Dimension(M) | 1.5(W)*6.0(L)*2.5(H) |
| Description | Specification |
|---|---|
| Working Speed | 4M/min |
| Substrate Width | 300mm |
| Substrate Thickness | 6um |
| Coating Type | Slit Die |
| Loading Uniformity | Target ±1.5% |
| Dryer Type | 1.5M * 3 Zones |
| Heat Source | Electrical Heater |
| Dimension(M) | 1.8(W)*7.0(L)*2.8(H) |
| Description | Specification |
|---|---|
| Working Speed | 8M/min |
| Substrate Width | 300mm |
| Substrate Thickness | 6um |
| Coating Type | Slit Die |
| Loading Uniformity | Target ±1.5% |
| Dryer Type | 2.5M * 4 Zones |
| Heat Source | Electrical Heater |
| Dimension(M) | 1.8(W)*15.5(L)*2.8(H) |
| Description | Specification |
|---|---|
| Working Speed | 15M/min |
| Substrate Width | 450mm |
| Substrate Thickness | 6um |
| Coating Type | Slit Die |
| Loading Uniformity | Target ±1.5% |
| Dryer Type | 4.0M * 4 Zones |
| Heat Source | Electrical Heater |
| Dimension(M) | 3.5(W)*25.0(L)*4.0(H) |
